The Birck Nanotechnology Center opened in July of 2005. This $58 million facility comprises 187,000 square feet, providing office space for 45 faculty, 21 clerical and technical staff, and up to 180 graduate students. The heart of the building is a 25,000 sq. ft. Class 10-100-1000 nanofabrication cleanroom, part of which is configured as a biomolecular cleanroom with separate entry and gowning areas and isolated air flow. The building also includes over 22,000 sq. ft. of laboratory space external to the cleanroom, including special low vibration rooms for nanostructures research, with temperature control to less than 0.1 °C. Other laboratories are specialized for nanophotonics, crystal growth, bio-nanotechnology, molecular electronics, MEMS and NEMS, surface analysis, SEM/TEM, electrical characterization, RF systems, instruction and training, and precision micro-machining. In addition, a unique nanotechnology incubator facility is provided for interaction with industry.