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Bruce BTI High Temp Oxidation Furnace BDF41

Title: Bruce BTI High Temp Oxidation Furnace BDF41
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

Bruce (BTI)

Model

BDF41

Wafer Size Range

    Minimum

50 mm

    Maximum

150 mm

    Set Size

150 mm

Number of Furnace Tubes

4

Furnace Tube #1:
Process

Oxidation

Gas System

    Gas Input Control

Mass Flow Controllers

    Process Gases

N2,O2,H2

    Bubbler

YES

Cantilever Loader

YES

Furnace Tube #2:
Process

Oxidation

Gas System

    Gas Input Control

Mass Flow Controllers

    Process Gases

N2,O2,H2

    Bubbler

YES

Cantilever Loader

YES

Furnace Tube #3:
Process

Oxidation

Gas System

    Gas Input Control

Mass Flow Controllers

    Process Gases

N2,O2,H2

    Bubbler

YES

Cantilever Loader

YES

Furnace Tube #4:
Process

Oxidation

Gas System

    Gas Input Control

Mass Flow Controllers

    Process Gases

N2,O2,H2

Close Date: March 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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