| Title: |
Bruce BTI High Temp Oxidation Furnace BDF41 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Bruce
(BTI) |
Model | BDF41 |
Wafer Size Range |
|
Minimum | 50 mm |
Maximum | 150
mm |
Set Size | 150 mm |
Number of Furnace Tubes | 4 |
Furnace Tube #1:
Process |
Oxidation |
Gas System |
|
Gas Input Control | Mass Flow Controllers |
Process Gases | N2,O2,H2 |
Bubbler | YES |
Cantilever Loader | YES |
Furnace Tube #2:
Process |
Oxidation |
Gas System |
|
Gas Input Control | Mass Flow
Controllers |
Process Gases | N2,O2,H2 |
Bubbler | YES |
Cantilever Loader | YES |
Furnace Tube #3:
Process |
Oxidation |
Gas System |
|
Gas Input Control | Mass Flow Controllers |
Process Gases | N2,O2,H2 |
Bubbler | YES |
Cantilever Loader | YES |
Furnace Tube #4:
Process |
Oxidation |
Gas System |
|
Gas Input Control | Mass Flow
Controllers |
Process Gases | N2,O2,H2 |
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |
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|