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Oxford Instruments RIE System Plasmalab 80 Plus

Title: Oxford Instruments RIE System Plasmalab 80 Plus
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-

ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

Oxford Instruments

Model

Plasmalab 80 Plus

Wafer Size Range

    Maximum

200 mm

Process

Reactive Ion Etch

Controller Type

PC Controller Type

Software Revision Level

PC2000 Version 1.7A

RF Generator Model

Dressler 300Watt, 13.56MHz

Automatch Text

Oxford OPT AMU

Number of Gas Inputs

Three Gas

Process Gases

CF4, O2, Ar

Chillers

    Number of Chillers

1

    Chiller #1Manufacturer/Model

Neslab RTE7

Other Information

Gas Pod: 6 gas inputs (3 inputs in use)
Vacuum Pump Package: Leybold WSU 251 and Leybold D40BCS

Power Requirements

208 V     26.0 A     50/60 Hz     3 Phase

Weight

380  lb  (172 kg)

Close Date: March 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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