| Title: |
AG Associates Rapid Thermal Processor 410 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|
Manufacturer |
AG Associates |
Model |
410 PC |
|
Description |
Rapid Thermal Processor |
Accessories |
Computer/keyboard/monitor
Quartz tray
|
|
Other Information |
- Manual loading
- Wafer size: 2", 3" and 4"
- Ramp up rate: Programmable, 10°C to 250°C
- Steady state duration: 0 to 9999 seconds per step
- Ramp down rate: Programmable, 1°C to 200°C
- Recommended steady-state temperature range: 400°C
to 1200°C
- ERP temperature accuracy: +3°C to -7°C
- Thermocouple temperature accuracy: ±2.5°C
- Cooling: Water
- Temperature repeatability: ±3°C
- Software: Version 4.02
|
Power Requirements |
208 V 90.0 A
60 Hz 1 Phase |
|
Year of Manufacture |
1992 |
Condition |
Very Good |
|
Exterior Dimensions |

|

|
Width |
18.000 in (45.7 cm) |
|
Depth |
24.000 in (61.0 cm) |
Height |
10.250 in (26.0 cm) |
|
Weight |
73 lb (33 kg) |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |