| Title: |
Plasmatherm Plasma Depostition System/RIE VII 734 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Plasmatherm |
Model | VII
734 |
Wafer Size Range |
|
Minimum | 50 mm |
Maximum | 200 mm |
Process | RIE/Plasma
Deposition |
Controller Type | Microprocessor Controller Type |
High Vacuum Pump | Alcatel 5402CP Turbo Pump |
Roughing Pump | Stokes P23-241 |
RF Generator Model | RFPP
10S |
Number of Gas Inputs | Eight Gas |
Chillers |
|
Number of
Chillers | 1 |
Chiller
#1Manufacturer/Model | Tek-Temp MM1500 |
Accessories | Tek-Temp Chiller |
Other Information | 8
Brooks model 5850 Mfc'S Four Marked as using Ethylene, N2O, CF4 and Ar
System last use for BTP
Depostion, POSSIBLY,
benzopyrene tetrol or tri-N-butylphosphine
telluride.
|
Power Requirements | 200-208 V 60 Hz 3Â Phase |
Year of Manufacture | 1992 |
Condition | Very Good |
Exterior Dimensions |
|
Width | 46.000 in (116.8 cm) |
Depth | 48.000 in (121.9 cm) |
Height | 66.000 in (167.6 cm) |
Weight | 1,157 lb (525 kg) |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |