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Plasmatherm Plasma Depostition System/RIE VII 734

Title: Plasmatherm Plasma Depostition System/RIE VII 734
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO 

THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

Plasmatherm

Model

VII 734

Wafer Size Range

    Minimum

50 mm

    Maximum

200 mm

Process

RIE/Plasma Deposition

Controller Type

Microprocessor Controller Type

High Vacuum Pump

Alcatel 5402CP Turbo Pump

Roughing Pump

Stokes P23-241

RF Generator Model

RFPP 10S

Number of Gas Inputs

Eight Gas

Chillers

    Number of Chillers

1

    Chiller #1Manufacturer/Model

Tek-Temp MM1500

Accessories

Tek-Temp Chiller

Other Information

8 Brooks model 5850 Mfc'S Four Marked as using Ethylene, N2O, CF4 and Ar
System last use for BTP Depostion, POSSIBLY,
benzopyrene tetrol or tri-N-butylphosphine
telluride.

Power Requirements

200-208 V     60 Hz     3 Phase

Year of Manufacture

1992

Condition

Very Good

Exterior Dimensions

    Width

46.000  in  (116.8 cm)

    Depth

48.000  in  (121.9 cm)

    Height

66.000  in  (167.6 cm)

Weight

1,157  lb  (525 kg)

Close Date: March 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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