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Lam Research RIE Etcher 384T

Title: Lam Research RIE Etcher 384T
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

LAM Research Co

Model

384 T

Wafer Size Range

    Minimum

75 mm

    Maximum

200 mm

    Set Size

100 mm

Process

Oxide Etch

Controller Type

Microprocessor Controller Type

Interface

RS 232

End Point Detection

Optical

Cassette to Cassette

YES

Loadlock

    Loadlock Yes/No

YES

    Loadlock Pump Manufacturer & Model

Ebara A10S

Roughing Pump

Ebara A70W

RF Generator Model

Drytek 1Kw 13.56 MHg

Number of Gas Inputs

Five Gas

Chillers

    Number of Chillers

2

    Chiller #1Manufacturer/Model

NESLAB HX75

    Chiller #2 Manufacturer/Model

NESLAB HX75

Year of Manufacture

1994

Condition

Very Good

Exterior Dimensions

    Width

33.000  in  (83.8 cm)

    Depth

62.000  in  (157.5 cm)

    Height

64.000  in  (162.6 cm)

Weight

1,800  lb  (816 kg)

Close Date: March 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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