| Title: |
Lam Research RIE Etcher 384T |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | LAM Research Co |
Model | 384
T |
Wafer Size Range |
|
Minimum | 75 mm |
Maximum | 200 mm |
Set Size | 100 mm |
Process | Oxide Etch |
Controller Type | Microprocessor Controller Type |
Interface | RS 232 |
End Point Detection | Optical |
Cassette to Cassette | YES |
Loadlock |
|
Loadlock
Yes/No | YES |
Loadlock Pump Manufacturer &
Model | Ebara A10S |
Roughing Pump | Ebara A70W |
RF Generator Model | Drytek 1Kw 13.56 MHg |
Number of Gas Inputs | Five Gas |
Chillers |
|
Number of
Chillers | 2 |
Chiller
#1Manufacturer/Model | NESLAB HX75 |
Chiller #2
Manufacturer/Model | NESLAB HX75 |
Year of Manufacture | 1994 |
Condition | Very Good |
Exterior Dimensions |
|
Width | 33.000 in (83.8 cm) |
Depth | 62.000 in (157.5 cm) |
Height | 64.000 in (162.6 cm) |
Weight | 1,800 lb (816 kg) |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |