| Title: |
Plasmatherm Inductively Coupled Plasma Etcher 790 ICP |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Plasmatherm |
Model | 790
ICP |
Wafer Size Range |
|
Minimum | 50 mm |
Maximum | 200 mm |
Controller Type | PC
Controller Type |
High Vacuum Pump | Leybold 361C |
Roughing Pump | Leybold
D40BCS |
RF Generator Model | RFPP RF20M & RF5S |
Automatch Text | RFPP AM
-20 & AM-5 |
Number of Gas Inputs | Three Gas |
Process Gases | TBD |
Other Information | The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M
The bottom
electrode is supplied 13.56 MHz RF at 500 Watts. RFPP Model RF5S
Refurbishment to
Include:
Cleaning and recalibration of mass flow controllers.
Rebuilding of Leybold D40BCS
prepped only with fomblin oil.
Rebuilding of Leybold 361C Turbo pump.
Cleaning of chamber and
gas shower.
|
Power Requirements | 208 V 60.0 A 60 Hz 3 Phase |
Year of Manufacture | 1998 |
Refurbished | YES |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |