| Title: |
Surface Technology Systems Silicon Etcher Multiplex |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Surface Tech Sys |
Model | MXP Multiplex ICP
ASE HR |
Wafer Size Range |
|
Minimum | 50 mm |
Maximum | 200 mm |
Set Size | 150 mm |
Process | Silicon Etch Bosch Process |
Loadlock |
|
Loadlock
Yes/No | YES |
Loadlock Pump Manufacturer &
Model | Edwards E2M40 |
High Vacuum Pump | Pfeiffer MAG 2000 |
Roughing Pump | Edwards
IQMB250 & IQDP80 |
RF Generator Model | ENI/ACG-3B and Advanced Energy RFG 3001 |
Number of Gas Inputs | Four Gas |
Process Gases | SF6, C4F8, O2, Ar |
Chillers |
|
Number of
Chillers | 1 |
Chiller
#1Manufacturer/Model | Huber/Unistat 140W |
Accessories | ICP V2 - Balun coil
Carousel in MkIV MPX - 2 x 150mm wafers
3KW
Source
300/30W platen
E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2
|
Other Information | Windows 2000
Bosch license
Current Power Requirements: 400V , 50Hz, 40 Amp, 3
phase
Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of
purchase.
|
CE Marked | YES |
Year of Manufacture | 2003 |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |