Astex ECR Plasma Etcher Plasmaquest 357 ECR

Title: Astex ECR Plasma Etcher Plasmaquest 357 ECR
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

PlasmaQuest

Model

357 ECR

Controller Type

PC Controller Type

Loadlock

    Loadlock Yes/No

YES

    Loadlock Pump Manufacturer & Model

Balzers TPH 062

High Vacuum Pump

Balzers TPH 2200

RF Generator Model

ENI ACG-3

Automatch Text

ENI Matchwork 5

Other Information

Controller:
(2) HPS 421 Cold Cathode Gauge Mirco-Controller
MKS Type 286 Controller
MKS Type 270 Signal Conditioner
Electrogrip Electrostatic Driver Model DR4
Pfeiffer Model TCP5000 Power Supply
Astex S-1500 Microwave Power Generator
Astex ECR Power Supply Model 20-125-2D-10/2
Astex ECR Power Supply Model EMS 27-185-2D-10/T
Process Chamber:
(2) Astex Model ECRM
Astex Model CS
Astex Model DCS
Astex Model TS
Astex Model LS
Astex Model SPC/F
Alcatel Throttle Valve

Close Date: March 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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