| Title: |
Astex ECR Plasma Etcher Plasmaquest 357 ECR |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | PlasmaQuest |
Model | 357
ECR |
Controller Type | PC Controller Type |
Loadlock |
|
Loadlock
Yes/No | YES |
Loadlock Pump Manufacturer &
Model | Balzers TPH 062 |
High Vacuum Pump | Balzers TPH 2200 |
RF Generator Model | ENI
ACG-3 |
Automatch Text | ENI Matchwork 5 |
Other Information | Controller:
(2) HPS 421 Cold Cathode Gauge Mirco-Controller
MKS Type 286 Controller
MKS Type 270 Signal Conditioner
Electrogrip Electrostatic Driver Model DR4
Pfeiffer Model TCP5000 Power Supply
Astex S-1500 Microwave Power Generator
Astex ECR Power Supply Model 20-125-2D-10/2
Astex ECR Power Supply Model EMS 27-185-2D-10/T
Process Chamber:
(2) Astex Model ECRM
Astex Model CS
Astex Model DCS
Astex Model TS
Astex Model LS
Astex Model SPC/F
Alcatel Throttle Valve |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |