| Title: |
Sharon Vacuum Sputtering System |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Sharon Vacuum |
Description | Sputtering System |
Vacuum System | Cryo Pumped |
Vacuum System | Leybold D40B Mechanical Pump
CTI Cryotorr 8 with CTI 8200 Compressor
|
Load Lock Included | No |
Target Size | 6" |
Quantity of DC Cathodes | 2 |
Quantity of RF Cathodes | 1 |
Number of RF Etch Cathodes | 0 |
Gas Inputs | Three |
Gas Input Control | Mass Flow Controllers |
Substrate Heaters | No |
Residual Gas Analyzer | No |
RF Generator |
|
Manufacturer | Advanced Energy |
Model | RFXII 1250 |
Rated Power Output | 1250 Watts |
Matching Network | Yes |
Other Information | Commonwealth Scientific 8" gridded ion source.
Sycon Model STM-100/MF thickness/rate monitor
MKS Series 600 Pressure Controller
Lake Shore Modle 818 Cryopump Monitor
Advanced Energy MDX 5K Magnetron Drive
Advanced Energy AZX 90 Tuner
Meivac Model VQ6ASAUSM Throttle Valve
Rotary substrate holder(holds up to 8" substrate)
Interior Chamber Dimensions: 21.5" x 21.5" x 21.5"
|
Power Requirements | 240 V 80.0 A 60 Hz 3 Phase |
|
| Close Date: |
March 31, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |