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Sharon Vacuum Sputtering System

Title: Sharon Vacuum Sputtering System
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

Sharon Vacuum

Description

Sputtering System

Vacuum System

Cryo Pumped

Vacuum System

Leybold D40B Mechanical Pump
CTI Cryotorr 8 with CTI 8200 Compressor

Load Lock Included

No

Target Size

6"

Quantity of DC Cathodes

2

Quantity of RF Cathodes

1

Number of RF Etch Cathodes

0

Gas Inputs

Three

Gas Input Control

Mass Flow Controllers

Substrate Heaters

No

Residual Gas Analyzer

No

RF Generator

    Manufacturer

Advanced Energy

    Model

RFXII 1250

    Rated Power Output

1250 Watts

    Matching Network

Yes

Other Information

Commonwealth Scientific 8" gridded ion source.
Sycon Model STM-100/MF thickness/rate monitor
MKS Series 600 Pressure Controller
Lake Shore Modle 818 Cryopump Monitor
Advanced Energy MDX 5K Magnetron Drive
Advanced Energy AZX 90 Tuner
Meivac Model VQ6ASAUSM Throttle Valve
Rotary substrate holder(holds up to 8" substrate)
Interior Chamber Dimensions: 21.5" x 21.5" x 21.5"

Power Requirements

240 V     80.0 A     60 Hz     3 Phase

Close Date: March 31, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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