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Ulvac Ferroelectric Etcher NE 7800

Title: Ulvac Ferroelectric Etcher NE 7800
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:
  ULVAC FERROELECTRIC ETCHER

Manufacturer

Ulvac

Model

NE 7800 Ferroelectric Etcher

Wafer Size Range

  Minimum

150 mm

  Maximum

200 mm

  Set Size

200 mm

Number of Chambers

4

Process Capabilities

Ta, FeRAM, RRAM, MRAM

Chamber 1 Description

Preheat Chamber
IR heater
Range: 200 to 600 deg C

Chamber 2 Description

ISM ICP Etch
ESD Chuck, 450C, He BS Cooling
Bias power: 2000W, 400 KHz
Antenna power: 3000W, 13.56 MHZ
UTM 1400FW/DIK Turbo Pump
Ebara ESR20N Dry Pump
Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3

Chamber 3 Description

ISM ICP Etch
ESD Chuck, He BS Cooling
Bias power: 2000W, 400 KHz
Antenna power: 3000W, 13.56 MHZ
UTM 1400FW/DIK Turbo Pump
Ebara ESR20N Dry Pump
Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3

Chamber 4 Description

Microwave Ashing Chamber
Heated Chuck, 280C
Bias power: 600W, 13.56 MHz
Microwave power: 3000W, 2.45 GHz
Endpoint detection
Ebara ESR200WN Dry Pump
Gases: 02, 02, H2/N2, CF4, N2

External Cooling

Water Cooled

Other Information

(3) Cassette load ports
(2) SMC Corp Model HRZ002 Chiller-Etch Chambers
(1) Ebara ESR20N dry pump, loadlock/xfer mod

Power Requirements

208 V     220.0 A     60 Hz     3 Phase

Year of Manufacture

2008

Condition

Like New

Close Date: November 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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