| Title: |
Ulvac Ferroelectric Etcher NE 7800 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
Click here for further information on this classified
|
| Description: |
| |
 |
|
Manufacturer |
Ulvac |
Model |
NE 7800 Ferroelectric Etcher |
|
Wafer Size Range |
|
|
Minimum |
150 mm |
|
Maximum |
200 mm |
Set Size |
200 mm |
|
Number of Chambers |
4 |
Process Capabilities |
Ta, FeRAM, RRAM, MRAM |
|
Chamber 1 Description |
Preheat Chamber
IR heater
Range: 200 to 600 deg C |
Chamber 2 Description |
ISM ICP Etch
ESD Chuck, 450C, He BS Cooling
Bias power: 2000W, 400 KHz
Antenna power: 3000W, 13.56 MHZ
UTM 1400FW/DIK Turbo Pump
Ebara ESR20N Dry Pump
Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3 |
|
Chamber 3 Description |
ISM ICP Etch
ESD Chuck, He BS Cooling
Bias power: 2000W, 400 KHz
Antenna power: 3000W, 13.56 MHZ
UTM 1400FW/DIK Turbo Pump
Ebara ESR20N Dry Pump
Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3 |
Chamber 4 Description |
Microwave Ashing Chamber
Heated Chuck, 280C
Bias power: 600W, 13.56 MHz
Microwave power: 3000W, 2.45 GHz
Endpoint detection
Ebara ESR200WN Dry Pump
Gases: 02, 02, H2/N2, CF4, N2 |
|
External Cooling |
Water Cooled |
Other Information |
(3) Cassette load ports
(2) SMC Corp Model HRZ002 Chiller-Etch Chambers
(1) Ebara ESR20N dry pump, loadlock/xfer mod |
|
Power Requirements |
208 V 220.0 A
60 Hz 3 Phase |
Year of Manufacture |
2008 |
|
Condition |
Like New |
|
| Close Date: |
November 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |