Scanning Electron Microscope With High Performance And Three Imaging Modes, The Quanta SEM from FEI Company


The Quanta SEM is a versatile high performance, low-vacuum scanning electron microscope with a tungsten electron source, with three imaging modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system.

Key Benefits

  • Seamless "point and click" transition between imaging modes
  • Superior low vacuum, low kV imaging
  • Simultaneous secondary electron (SE) and back-scattered electron (BSE) imaging in low vacuum mode
  • Allows for in-situ dynamic experiments
  • True surface (SE) imaging in all vacuum modes and voltages
  • Easy-to-use, four quadrant/single quadrant user interface

Features and Use

The Quanta is easy to use. Its four-quadrant image display simultaneously provides surface information and phase distribution through the live imaging of secondary electron (SE) and back-scattered electron (BSE) images. A single mouse click switches imaging modes.

The low vacuum detectors are not sensitive to light generated during sample heating, so in-situ dynamic heating experiments can be imaged and recorded live at temperatures up to 1500° C.

The Quanta is a versatile system, which can be equipped with various analytical systems such as EDS, WDS and EBSD.


The Quanta SEM is available with three different stage sizes: 6'' (150 mm), 4'' (100 mm) or 2'' (50 mm).

Source: FEI Company
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