Abrasion-Resistant Coatings and Semiconductor Polishing Aluminum Oxide Nanomaterials from Nanophase Technologies Corporation

Topics Covered

Integrated Family of Technologies
Abrasion-Resistant Coatings
Semiconductor Polishing
Products, Data and Specifications
NanoTek® Aluminum Oxide
Typical Properties
Aluminum Oxide Nanopowders
     NanoTek® Aluminum Oxide 0115
     NanoDur® Aluminum Oxide 0119
Aluminum Oxide Dispersions
Aluminum Oxide Dispersions for Paints
     NanoDur® X1121W, 50wt% EXP 0187
     NanoDur® X1130PMA, 50wt% EXP 0151
NanoTek® AL-6000 Series Aluminum Oxide Dispersions for Polishing
     NanoTek® AL-6021, 50wt% EXP 027
     NanoTek® AL-6050, 23wt% EXP 0185
     NanoTek® AL-6053, 23wt% EXP 0159
     NanoTek® AL-6081, 23wt% EXP 0180
     NanoTek® AL-6083, 23wt% EXP 0181

Integrated Family of Technologies

As a leader in the field of nanomaterials technologies, Nanophase has evolved from solely a producer of nanoparticles into an integrator of commercially scaled nanomaterial technologies focused on market and customer applications. Nanophase Technologies Corporation manufactures a variety of nanocrystalline powders in commercial quantities. The nanocrystalline metal oxides typically have a mean particle size less than 100 nm, are non-porous single crystals, have defined surface chemistry, and are chemically pure. Further modification of these materials often involves vapor-phase coating to prepare a surface-modified dry powder, or liquid phase processing to prepare a dispersion that is compatible with the application. Nanophase’s family of integrated technologies economically produces nanocrystalline materials and then nanoengineers those materials to fit customer’s needs.

Figure 1. Nanophase development process

Nanophase’s development process is designed to produce the most advantageous nanomaterials solution for an application. The foundation technologies are the patented Physical Vapor Synthesis (PVS) process and patent pending NanoArc® Synthesis (NAS) process. These processes use plasma energy to produce pure, non-agglomerated, non-porous, single-phase metal and mixed metal oxide nanoparticles at annual capacities measured in tens of thousands of kilograms per reactor. Nanoparticle size and surface chemistry can be tailored for applications as the nanomaterial is produced.

Abrasion-Resistant Coatings

The incorporation of nanomaterials in surface coatings can provide long-term abrasion resistance without significantly effecting optical clarity, gloss, color or physical properties. The need for scratch, mar and/or abrasion resistance is well established in various markets, including fingernail polishes, flooring, plastic glazing, headlamp covers and other automotive parts, transportation windows and optical lenses, where clear scratch-resistant coatings are used. NanoDur® alumina is especially well-suited for incorporation into coating systems, greatly enhancing abrasion resistance with minimal effects on clarity, gloss and physical properties of the coatings. The NanoDur® products can also be surface treated through proprietary technology to ensure compatibility with a variety of coating systems.

Semiconductor Polishing

As the semiconductor industry continues to move forward to smaller chip architecture, the need for advanced CMP slurries becomes a requirement that cannot be met by the slurries provided in the past. Nanophase’s brand of ceria, mixed rare earth metal oxides and alumina dispersions are on the forefront of providing high planarity surfaces and efficient removal rates.

These high purity dispersions feature particles less than 100 nanometers in size with uniform morphology for critical electronic polishing applications. The unique surface chemistry of these nanomaterials allows formulation of highly concentrated dispersions at a variety of pH.

Products, Data and Specifications

NanoTek® Aluminum Oxide

Figure 2. NanoTek® Aluminum Oxide

Typical Properties

  • Al2O3, Purity 99.5+%
  • APS 45 nm (determined from SSA)
  • SSA = 45 m2/g (BET)
  • Appearance = Off-White to Gray
  • Bulk Density = 0.26 g/cc
  • True Density = 3.6g/cc
  • Morphology = Spherical
  • Crystal Phase = 70:30 Delta: Gamma

Aluminum Oxide Nanopowders

NanoTek® Aluminum Oxide 0115

Good general purpose nanomaterial suited for ceramic, catalyst and coatings applications. NanoTek® Aluminum Oxide can be incorporated into coating systems, greatly enhancing abrasion resistance with minimal effects on clarity, gloss and physical properties of the coatings.

NanoDur® Aluminum Oxide 0119

NanoDur® Aluminum Oxide is designed for coatings where transparency is of utmost importance.  NanoDur® Aluminum Oxide is especially suited for incorporation into coating systems, greatly enhancing abrasion resistance with minimal effects on clarity, gloss and physical properties of the coatings.

Aluminum Oxide Dispersions

Nanophase has worked diligently for years to develop expertise in dispersing nanomaterials in water, polar organics and non-polar organics.  We offer most of our products in one or more standard dispersions.  We also offer the service of dispersing a nanomaterial in the bulk medium of your choice as long as it is of low viscosity, non toxic, and has a flash point greater than 100°F.

Aluminum Oxide Dispersions for Paints

NanoDur® X1121W, 50wt% EXP 0187

Water borne aluminum oxide dispersion is suitable for incorporation in water compatible coatings to improve mar resistance.

NanoDur® X1130PMA, 50wt% EXP 0151

Aluminum oxide dispersion in Dowanol PMA is suitable for incorporation in a wide variety of coatings formulations to improve mar resistance.

NanoTek® AL-6000 Series Aluminum Oxide Dispersions for Polishing

NanoTek® AL-6021, 50wt% EXP 027

Aluminum oxide water borne dispersion is suitable for use in acid side fine polishing slurries, designed to be especially suitable for marble polishing formulations.

NanoTek® AL-6050, 23wt% EXP 0185

Aluminum oxide water borne dispersion is suitable for use in acid side ultra fine polishing slurries.  The largest particle size of our AL-6000 series but with tight particle size distribution and is intended for applications where both high removal rate and good surface finish are required.

NanoTek® AL-6051, 23wt% EXP 0142

Aluminum oxide water borne dispersion is suitable for use in acid side ultra fine polishing slurries.

NanoTek® AL-6053, 23wt% EXP 0159

Aluminum oxide water borne dispersion is suitable for use in acid side ultra fine polishing slurries.  Same average particle size, but tighter particle size distribution than 6051.

NanoTek® AL-6081, 23wt% EXP 0180

Aluminum oxide water borne dispersion is suitable for use in alkaline side ultra fine polishing slurries.

NanoTek® AL-6083, 23wt% EXP 0181

Aluminum oxide water borne dispersion is suitable for use in alkaline side ultra fine polishing slurries.  Same average particle size, but tighter particle size distribution than 6081.

Date Added: Sep 13, 2006 | Updated: Jun 11, 2013
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