Scanning Probe Ellipsometric
Ellipsometry is a well-known non-destructive optical method
for determining film thickness and optical properties. Imaging
Ellipsometry combines the power of ellipsometry with microscopy and
overcomes the limits of classical ellipsometers.
The Accurion Imaging Ellipsometers enable you to study the surface in three
- Generating high contrast image from the surface
- Ellipsometry with highest lateral resolution (1µm)
- Generating of 3D thickness maps
Accurion Imaging Ellipsometers operate on the principle of classical
null ellipsometry and real-time ellipsometric
contrast imaging. It has been utilized in surface analysis for more than 6
years and has a unique lateral resolution of 1 µm.
Ellipsometric Microscope (SPEM)
Lateral structures less than 1 µm can be studied with the Accurion Scanning Probe
Ellipsometric Microscope (SPEM). SPEM is a
combination of the Imaging Ellipsometer with a Scanning Probe Microscope.
Ellipsometry Platform EP³
Ellipsometry Platform EP³ is the modular solution for Imaging
Ellipsometry with modules for large area measurements and spectroscopic
Figure 1. 3D thickness map
Figure 2. Analytical software module
Source: Accurion GmbH
For more information on this source please visit Accurion