| Intel has claimed to have produced fully functional 65 nanometer SRAM chips using 12-inch (300mm) silicon wafers. They are expected to go into production in 2005. The chips use a second generation version of Intel's strained silicon, copper interconnect, and low-k dielectrics. The 4Mbit SRAM cells are only .57µ2 in size which means that 10 million chips could fit inside the tip of a ball point pen. |