MagicScan - New Feedback and Scanning Process Control Algorithms by AIST-NT

Topics Covered

Introduction
MagicScan Technology from AIST-NT
Features of MagicScan

Introduction

AIST-NT Co. is a young dynamic company founded by former employees of NT-MDT with the simple goal of satisfying our customers' needs and exceeding their expectations. With over 15 years experience in combined AFM/SPM/Raman Spectroscopy, our main focus is on the innovative research and development of advanced integrated scanning systems for nanotechnology. Besides the most progressive engineering in the field including custom devices for OEM customers, outsourcing and R&D in nanotechnology, AIST offers the highest quality service and customer support.

MagicScan Technology from AIST-NT

AIST-NT presents the MagicScan technology which is the set of feedback and scanning process control algorithms. These algorithms allow eliminating different dynamical errors such as overshooting, ringing and phase lag.

Features of MagicScan

The MagicScan key feature is the absence or some negligible level of image distortions while the scan rate is altered over the wide range.

When the MagicScan technology is applied together with the SmartSPM™ scanner, the outstanding results can be achieved because our SmartSPM™ scanner owns the highest XY and Z resonant frequencies among all commercially available SPM wide range scanners (100x100x15 um, up to 7kHz in XY & 15kHz in Z).

To demonstrate our new technology, we have chosen a sample with some complex topography. The sample is a silicon test grating with 3 microns pitch and 25 nm height. The imaging of such samples is a hard job for any SPM. First, it's due to several or many (on scan areas of tens of microns) sharp steps along scan line. Second, the surface is rather smooth that makes it possible to clearly see any ringing and overshooting of the scanner. In addition, the imaging of small steps (few nanometers) among the high steps (25 nm) shows no loss of resolution while accelerating the scan rate.

We use the semicontact AFM mode with a stiff probe (i.e. resonance frequency is about 500 kHz), 12x12 microns and 30x30 scan areas and 300x300 and 400x400 points XY image resolution respectively.

12µm scanning

30µm scanning

On the 12x12 microns scan area the rate is increased from 3 to 30 lines per second, while on the 30x30 microns area it's increased from 2 to 20 lines/sec. The actual value of the current scan rate is shown near the "rate " field in the scan window (since we use the Z-error adaptive scanning algorithm, the actual rate is slightly different from the setting value). On the bottom-right corner you can see the scanner X-sensor signal, which corresponds to the scanner movement. The frequency of this signal is equal to the scan rate.

Source: AIST-NT

For more information on this source please visit AIST-NT

Date Added: Jul 6, 2009 | Updated: Jun 11, 2013
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