Single Plane XY Table for Precision Positioning Applications by IntelLiDrives

Topics Covered

Background
Conventional Drive Systems
The IntelLiDrives Air Bearing Planar XY Table
Direct Drive Positioning
How the System Works
System Specifications

Background

In the submicron applications field, positioning stages and systems have to satisfy accuracy requirements that are several times higher than in other areas.

Conventional Drive Systems

At the same time, the use if even more efficient equipment for pattern generation, precision processing and inspection of wafers, masks, etc. calls for even shorter positioning times. However, conventional generation of linear or plane motions by conversion of a rotary motion of the motor with the aid of mechanical drives and ball screws gives rise to vibrations within the system. More often than not, mechanical guides and the resultant losses due to fraction cause an additional degradation of the dynamic characteristics of the system.

The IntelLiDrives Air Bearing Planar XY Table

IntelLiDrives Air bearing Planar XY table reconciles the contradiction of precision and speed with a simple and cost-effective solution.

Direct Drive Positioning

The IntelLiDrive Cartesian Planar XY table does not require any mechanical guides, drives or ball screws and, therefore, avoids all the drawbacks of the traditional conversion of rotary motion into linear. Utilizing planar linear motor technology, IntelLiDrives, Inc. Cartesian system is a true direct drive single plane positioning XY table.

How the System Works

The system works on the reluctance principle and allows motion in the plane with precision, acceleration and speed. Two component system consists of passive, magnet-free stationary platen, constructed of lightweight composite materials, and dual axes moving forcer, gliding on the air bearings which assures clean room compatibility while the flat single plane design of this XY table reduces pitch and roll errors.

System Specifications

Specifications of the IntelLiDrive Cartesian Planar XY table include:

  • Scalable forcer design provides forces from 25N to 500N, motion repeatability
  • 0.25 microns with travel up to 2 m at speed of 2 m/sec.

Source: IntelLiDrives

For more information on this source please visit IntelLiDrives.

Date Added: Mar 4, 2010 | Updated: Jun 11, 2013
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