Automatic Defect Review for Hard Disk Media and Substrates Using The XE-HDM Atomic Force Microscope (AFM) by Park Systems

Topic List

Park Systems Providing Solutions for HDD Industry
Limitations of Current Methods of HDM Defect Review
Challenges with Developing Automated Defect Review Atomic Force Microscopes
Limitations of Conventional AFMs
     Scanner Bowing
     Non-Contact Mode
The XE-HDM Automatic Defect Review AFM from Park Systems
The XE-HDM Automatic Defect Review AFM vs. Conventional AFMs
     Flat and Linear XY Scan
     True Non-Contact Mode
Features of The XE-HDM Automatic Defect Review AFM
Key Benefits of The XE-HDM Automatic Defect Review AFM
Result of Test Runs

Park Systems Providing Solutions for HDD Industry

Park Systems serves the hard disk drive (HDD) industry with automated nanotechnology measurement solutions including atomic force microscopes, software, and global service and support. Partnering with world leaders in HDD industry, Park Systems has been successfully delivering optimized solutions for the most challenging imaging and measurement needs in the industry.

Park Systems' HDD-Optimize program is the state-of the-art nanotechnology solution service for the hard disk drive industry. Under the systematic approach of the program, Park Systems ensures rapid alignment and performance of the XE nanotechnology measurement platform with the specific requirement of its customers.

Limitations of Current Methods of HDM Defect Review

Limitations in current method of hard disk media (HDM) defect review include:

  • Low throughput: 10 defects per day at best
  • High labor cost
  • Destructive method

Challenges with Developing Automated Defect Review Atomic Force Microscopes

During Survey Scan;

  • Small defects are imaged in one or two pixels.
  • Signal level is often low

The solution. We need atomic force microscopes with

  • Low system noise, less than 0.5 A rms
  • Artifact-free AFM scan
    • to detect tiny defect signal during the Survey Scan
    • to profile the defect type (pit, bump, scratch, etc)

Limitations of Conventional AFMs

Limitations in Conventional AFMs include:

  • Scanner Bowing (Piezo tube is NOT an Orthogonal 3-D Actuator)
  • Non-Contact Mode (not Possible)

Scanner Bowing

  • Flattening, software correction, is required
  • Distorts or wipes out tiny defect signals during the Survey Scan

Non-Contact Mode

  • Inevitable tip wear occurs when using contact or tapping mode
  • Tip life is not long enough to complete “one” automated defect review run

 

The XE-HDM Automatic Defect Review AFM from Park Systems

Continuing the Park Systems' impressive track record of developing optimized solutions, Park Systems introduces XE-HDM, an automatic defect review AFM which revolutionizes the way defects in HDD substrates and media are searched, scanned and analyzed. The new XE-HDM significantly increases throughput for the defect review process.

The XE-HDM Automatic Defect Review AFM vs. Conventional AFMs

XE-HDM Automatic Defect Review AFM overcomes challenges and limitations of conventional AFMs by offering:

Flat and Linear XY Scan

  • No Flattening is required, providing flat and linear XY scan
  • All defects can be detected during the Survey Scan without any artifacts

True Non-Contact Mode

  • Significantly increased tip life (less tip wear and tear)
  • Consistent tip condition throughout multiple automatic runs

Features of The XE-HDM Automatic Defect Review AFM

Features of XE-HDM Automatic Defect Review AFM include:

  • Automated reference marker detection
  • Automated stage mapping of XE-HDM
  • Transfer KLA Tencor Candela™ defect map to XE-HDM
  • Automated survey scan of defects mapped by Candela™
  • Automated zoom-in scan of specified defects
  • Automated profiling of imaged defect types
  • Automated analysis of imaged defects (in development)

Key Benefits of The XE-HDM Automatic Defect Review AFM

Key benefits of XE-HDM Automatic Defect Review AFM include:

  • Automated defect review for hard disk media and substrates enabled
  • Non-destructive method
  • Significant increase in throughput (500-800%)
    • Over 95% success rate of finding and imaging defects
    • Throughput of approximately 10 defects per hour

Result of Test Runs

The test runs demonstrate over 500 ~ 800 % gain in throughput. The automation allows users to manage several tools simultaneously

 

Source: Park Systems

For more information on this source please visit Park Systems

Date Added: Nov 26, 2010 | Updated: Sep 20, 2013
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