Surface Passivation of Crystalline Silicon Solar Cells using TFS NX300 Atomic Layer Deposition (ALD) System by Beneq

Topics Covered

Overview
Surface Passivation of Crystalline Silicon Solar Cells using Atomic Layer Deposition
Benefits of Surface Passivation of Crystalline Silicon Solar Cells using Atomic Layer Deposition
TFS NX300 Atomic Layer Deposition System

Overview

Beneq Oy, based in Finland, is a supplier of equipment and coating technology for global markets. Beneq turns innovations into success by developing applications and equipment for cleantech and renewable energy fields, especially in glass, solar and emerging thin film markets. Coating applications include optics, barriers and passivation layers, as well as energy generation and conservation. Beneq also offers complete coating services. Beneq's coating applications are based on two enabling nanotechnology platforms: Atomic Layer Deposition (ALD) and aerosol coating (nHALO® and nAERO®).

Surface Passivation of Crystalline Silicon Solar Cells using Atomic Layer Deposition

The PV industry today needs to increase conversion efficiency without jeopardizing the economic and technical feasibility of industrial production. A proven means to improve the efficiency of crystalline silicon (c-Si) solar cell wafers is surface passivation by atomic layer deposition (ALD). Passivation of the surface enhances the overall cell efficiency by prolonging the charge-carrier effective lifetime. Surface passivation by ALD is beneficial on both the front and rear surface of an n-type wafer.

Beneq ALD industrial surface passivation of c-Si solar cells

Beneq ALD provides an efficient solution for surface passivation. The TFS NX300 Thin Film System, developed solely for the PV industry, is designed especially for industrial production of surface passivation (Al2O3) coating on c-Si solar cell wafers. The types of c-Si solar cell surfaces that benefit from ALD-based Al2O3 surface passivation include p- and n-type base (rear surface) and boron-doped p+ emitter (front surface).

Benefits of Surface Passivation of Crystalline Silicon Solar Cells using Atomic Layer Deposition

The main benefits of surface passivation of crystalline silicon solar cells using atomic layer deposition include

  • 1-2 percentage point increase in efficiency
  • Surface passivation based on a high negative fixed charge
  • No absorption in the visible spectrum results in an increase in reflection of IR light from the back electrode (for 100 nm Al2O3)
  • Low-temperature processing (150 - 250 °C)
  • Unprecedented coating uniformity
  • High throughput with Beneq TFS NX300, up to 3000 wafers/h

For customers to gain instant access to the benefits of ALD and Al2O3 surface passivation, prior to industrial production, Beneq offers contract coating services.

TFS NX300 Atomic Layer Deposition System

The TFS NX300 Thin Film System is a fully automatic in-line coating system designed for industrial-scale manufacturing of surface passivation coatings on crystalline silicon solar cell wafers. The system exhibits the following main properties.

  • Industrial fully-automated production equipment
  • Automatic cassette-to-cassette system
  • Throughput 3000 wafers/h
  • Detailed setup subject to customer specifications

More information about the TFS NX300 is available on the TFS NX300 equipment page.

Source: Beneq

For more information on this source please visit Beneq

Date Added: Jan 14, 2011 | Updated: Jun 11, 2013
Ask A Question

Do you have a question you'd like to ask regarding this article?

Leave your feedback
Submit