Micro Contact Printing (µ-CP) - Overview and Systems Available for Micro Contact Printing by EV Group

Topics Covered

Introduction
What is Micro Contact Printing?
EVG®620 and EVG®6200 Infinity Automated Micro Contact Printing Systems

Introduction

Since the first Nano Imprint Lithography (NIL) publications, interest in the technology has grown rapidly - starting with the scientific community and then moving to industrial sectors like integrated optics, sensors and micro fluidics.

NIL offers several technical advantages with respect to resolution, overlay accuracy, and tool design. In addition to creating high resolution features in the nanometer range, NIL can also be employed for replicating much larger features. Presently, NIL is utilized in optical applications for the production of optical elements with feature sizes in the sub-millimeter range. With the ever increasing demand for higher integration of functionality, combined with the need to reduce structure sizes at acceptable costs, traditional lithographic techniques are fast approaching their limits. NIL is a competitive candidate for Next Generation Lithography (NGL) due to its advantages in resolution and cost effectiveness.

The potential of this technology has been acknowledged by leading experts. Subsequently, it has been added to the International Technology Roadmap for Semiconductors (ITRS) as a potential NGL solution for microelectronics at the 32 nm node and beyond.

EVG offers solutions within the three main areas of Nanoimprint Lithography (NIL):

What is Micro Contact Printing?

In a Micro Contact Printing process, inked chemicals are transferred from an elastomeric stamp to a novel metal surface to build up a Self Assembling Monolayer (SAM). A SAM can be used as an etching mask or act as a precursor for binding specific molecules covalently. In some cases Thioles are transferred to Gold surfaces on silicon wafers acting as an etching mask. Other common inks used are proteins for biological or biotechnological applications.

EVG®620 and EVG®6200 Infinity Automated Micro Contact Printing Systems

EVG620 and EVG6200 Infinity configured for Micro Contact Printing, applies a uniform contact force to the inked soft stamps. Soft stamps are typically made of elastomer material such as PDMS (polydimethylsiloxane). Alignment is performed through this transparent PDMS stamp.

EVG®620 Mask aligner for single step UV-imprinting
Source: EVG.

Micro contact printing tool in the EVG®620
Source: EVG.

Contact-inking stamps for micro contact printing of Alkanethiols on Gold
Source EVG, Courtesy of IBM

Source: EV Group

For more information on this source please visit EV Group

Date Added: Jan 17, 2011 | Updated: Jun 11, 2013
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