SMS-NIL - Introduction to Soft Molecular Scale UV-Nanoimprint Lithography by EV Group

Topics Covered

Overview
Soft Molecular Scale UV-Nanoimprint Lithography
Principles of Soft Molecular Scale UV-Nanoimprint Lithography
Examples of Soft Molecular Scale UV-Nanoimprint Lithography Imprints
Unique Features of Soft Molecular Scale UV-Nanoimprint Lithography
Purchase Options for Soft Molecular Scale UV-Nanoimprint Lithography

Overview

EV Group (EVG) targets advanced packaging, compound semiconductor and silicon-based power devices, MEMS, nanotechnology and SOI markets with its industry-leading wafer-bonding, lithography/nanoimprint lithography(NIL), metrology, photoresist coating, cleaning and inspection equipment.

EV Group (EVG) is a recognized technology and market leader for wafer processing equipment. We have set worldwide industry standards for aligned wafer bonding as well as resist processing for the MEMS, Nano and Semiconductor Industry. Our technological expertise enables customers to develop and successfully commercialize their innovations by providing advanced and proven process solutions from R&D to volume production. A comprehensive range of equipment addressing R&D applications as well as fully automated processes is the result of long term, cooperative relationships with our extensive list of global customers.

Soft Molecular Scale UV-Nanoimprint Lithography

Based on EVG’s proven UV-NIL systems, SMS-NIL provides customers with a repeatable, cost-effective process for producing ultra-highresolution patterning on large-area surfaces. SMS-NIL enables ultra-high-resolution patterning of features down to 12.5 nm. Using SMS-NIL's soft working stamp nanoimprint process, customers can perform full-area nanoimprints and optically aligned UV-NIL on existing EVG equipment. Likewise, the stamp and imprinting can be processed on the same tool without requiring additional processing steps—saving customers significant processing time and money.

Principles of Soft Molecular Scale UV-Nanoimprint Lithography

SMS-NIL uses polymeric working stamps replicated from high resolution, expensive master templates and can be used for multiple imprints. The obtained working stamps have relative low surface energy, which ensures an easier separation from the substrate after the imprinting process. The inherent soft stamp material properties reduce the risk of mechanical damage of the master template largely and thus enhance their lifetime.

Processing cost of SMS-NIL is significantly lower than in other nano-patterning techniques, which makes SMS-NIL an even more successful and powerful lithography technique for various applications. SMS-NIL is already used in industrial environments for CMOS image sensors micro lens moulding and other optical applications.

The resolution of ultra-fine features implies new materials and an optimized process flow for reliable and repeatable imprinting on large areas using EVG’s well established UV-NIL systems. The master stamps were fabricated by IMS Nanofabrication AG Vienna using CHARPAN (charged particle nanopatterning with ion multi-beam projection).


Source: EVG.

Examples of Soft Molecular Scale UV-Nanoimprint Lithography Imprints

The enclosed images show SMS-NIL imprint results for 12.5 nm lines and dots with an aspect ratio of 2:1 replicated on an EVG620 NIL system on 100 mm Si wafers.


12.5 nm half pitch L/S structures
Source: EVG, Courtesy of IMS Nanofabrication AG, Vienna.


Close up of 12.5 nm half pitch L/S structures
Source: EVG, Courtesy of IMS Nanofabrication AG, Vienna.


12.5 nm half pitch dots
Source: EVG, Courtesy of IMS Nanofabrication AG, Vienna.


Close up of 12.5 nm half pitch dots
Source: EVG, Courtesy of IMS Nanofabrication AG, Vienna.

Unique Features of Soft Molecular Scale UV-Nanoimprint Lithography

Unique Features of SMS-NIL include:

  • Cost of ownership advantage due to
    • Use of polymeric stamp
    • No need to apply anti-sticking layers
    • Conservation of master template
    • Multiple reusability of soft stamps
  • Highest resolution with polymeric stamps
  • Large area imprint capability
  • Applicable on all EVG UV-NIL systems (EVG620, EVG6200, IQ Aligner, EVG770)

Purchase Options for Soft Molecular Scale UV-Nanoimprint Lithography

EV Group offers two flexible purchase options for SMS-NIL. Customers who are interested in producing the working stamps in-house may purchase EV Group's process technology consultancy services to enable their own application development. EV Group also offers the option of purchasing working stamps ready for processing.

The shown results were funded by the Austrian Nano-Initiative (www.nanoinitiative.at, FFG and BMVIT) through the NILdirect_stamp and NILstamp_replication projects of the NILaustria project cluster (www.NILaustria.at).

Source: EV Group

For more information on this source please visit EV Group

Date Added: Jan 17, 2011 | Updated: Jun 11, 2013
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