Micro Electro-Mechanical Systems MEMS – Measurement of Surface Features and Dimensions

By AZoNano Editors

Table of Contents

Introduction
Metrology
     Roughness Measurement
     Monitoring Step Height
     Lateral Dimensions
Taylor Hobson

Introduction

Microelectro-mechanical systems are being utilized for a variety of applications such as microfluidic pumps, micromirror display devices, and acceleration and pressure sensors. The MEMS units extend the fabrication techniques utilized in the IC industry to produce mechanical components such as connecting beams, diaphragms, and gears. Precise measurement of these components is crucial in being able to satisfy the increasing demand for high-quality, low-cost MEMS units.

Metrology

Roughness Measurement

Measuring the roughness within MEMS units enables control of surface interactions, irrespective of whether they are solid to liquid interactions or solid to solid interactions. Solid to liquid interactions are encountered in microfluid pumps whereas solid to solid interactions are common in microgear systems.

Monitoring Step Height

Step height measurement of MEMS units is crucial for monitoring the performance of the device. Step height, in addition to providing lateral dimension information, also provides good mass approximation that impacts the oscillating frequency of the components present in the device.

Lateral Dimensions

Lateral dimensions are critical for analyzing fluidic systems and microgears. Measuring the surface area and volume, in addition to measuring vital dimensions such as beam width, help in controlling the performance of the final device.

 

Taylor Hobson

Taylor Hobson is an ultra-precision technology company operating at the highest levels of accuracy within the field of surface and form metrology. They provide contact and non-contact measurement solutions to the most demanding applications on a global basis, with a worldwide infrastructure to support our clients, wherever they may be.

This information has been sourced, reviewed and adapted from materials provided by Taylor Hobson.

For more information on this source, please visit Taylor Hobson.

Date Added: Apr 8, 2011 | Updated: Jun 18, 2013
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