Measurement of Step Heights on High Tech Components

By AZoNano Editors

Table of Contents

Introduction
Metrology
     3D Step Height Measurement
     2D Step Height Measurement
     ISO Standard for Step Height Measurement
Taylor Hobson

Introduction

Repeatable and precise measurement of step height is crucial for a variety of hi-tech applications. Taylor Hobson offers a line of devices to meet the high demands for step height measurement. The devices cover step height ranges from sub-nanometer to millimeter with repeatability of less than 0.1 nm.

Metrology

3D Step Height Measurement

3D step height provides the difference in height between two planes, which is defined by two regions on a surface. The first region is used as a reference and the software sets a least number of squares planes through this region. The second plane is measured from this position. In addition, the angle difference, the maximum and minimum height, and the mean step height is also measured.

2D Step Height Measurement

2D step height measurement determines step height for simple geometries such as rectangular areas. The 2D step height can also be utilized for measuring the thickness of an exposed edge.

ISO Standard for Step Height Measurement

ISO 5436-1 offers a well-recognized standard of measuring the step height. This is crucial for comparing step height measurements taken using various measurement devices. 3D and 2D step height measurement devices comply with this ISO standard.

Taylor Hobson

Taylor Hobson is an ultra-precision technology company operating at the highest levels of accuracy within the field of surface and form metrology. They provide contact and non-contact measurement solutions to the most demanding applications on a global basis, with a worldwide infrastructure to support our clients, wherever they may be.

This information has been sourced, reviewed and adapted from materials provided by Taylor Hobson.

For more information on this source, please visit Taylor Hobson.

Date Added: Apr 8, 2011 | Updated: Jun 18, 2013
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