Deposition of Organics in UHV Thin Film Processes

By AZoNano

Table of Contents

Introduction
Features and Benefits
VG Scienta Low Temperature Organic Deposition Cell
Glove Box Compatible Organic Deposition Module
About VG Scienta

Introduction

The organics deposition module from VG Scienta can be operated either as a component of the VG Scienta OFT EDGE cluster tool, or as a stand-alone unit with fast entry load lock. It is equipped with a motorized rotary substrate holder that can handle masks and substrates of up to 100 mm in either round or square geometry. Up to eight of the VG Scienta high stability organic sources can be housed into the organics module. These are placed in such a manner to provide high homogeneity across the substrate.

OFT EDGE Deposition Chamber Setup

The cell crucible is designed to optimize the emission of molecules from the source irrespective of the material level within the source. It is possible to adjust the distance between the source and the substrate so that the deposition of the selected material can be optimized. This capability together with the careful angular positioning of the source provides improved uniformity.

Features and Benefits

The following are the key features and benefits of the VG Scienta organics deposition module:

  • Standard 8 cell with up to 11 cell options
  • Substrate rotation to ensure optimal homogeneity
  • Stand alone capability for small-scale research
  • Availability of high temperature cell options
  • High-stability dynamic response low temp cells

With simple removable shields, the main chamber is easy cleanable and can easily change materials as required. The chamber is built utilizing UHV methods and materials to obtain a steady environment and vacuum levels of 10-9 mbar, with bakeout possibility to 130 °C. The system is turbomolecular pumped by utilizing dry pump technology so as to protect the sample integrity.

A slave and master setup provides the control for the unit, thus enabling the module to be run as a whole unit with all deposition and pump functions that are displayed and controlled on the operator interface unit.

VG Scienta Low Temperature Organic Deposition Cell

VG Scienta Low Temperature Organic Cell

The VG Scienta low temperature organic deposition cell offers a highly dynamic controllable source for use in research applications. The dynamics of the cell enable rapid heating, which, in turn, minimizes the waste of high-cost materials in prolonged stabilization regimes and facilities increased stability and response when under control by allowing the cell to be cooled down rapidly. The following are the key features of the low temperature cell:

  • Cool down from 500 °C to 100 °C in below 70 minutes
  • Temperature control of ±0.1 °C at all temperatures
  • Maximum rate of deposition is 1 Å/sec at 300 mm substrate to source distance and 2 Å/sec at 180 mm substrate to source distance
  • Standard crucibles are aluminum oxide and quartz in either cylindrical or tapered form

Each source is provided with its own main shutter to enable cell thermal stabilization, and comes with an additional step shutter option for graduated ‘step’ deposition. The evaporation chamber is easily accessible thanks to the top flange design.

Glove Box Compatible Organic Deposition Module

The glove box compatible organic deposition module enables introducing substrates into the module under an oxygen- and water-free environment. Moreover, it facilitates maintaining and refilling the deposition sources with oxygen and water sensitive materials. The deposition module provides outstanding material control thanks to the inclusion of VG Scienta's high stability dynamic response low temperature cells. The following are the key features of the glove box compatible organic deposition module:

  • Compatible with the VG Scienta cluster tool range
  • 8 cell configuration for organics as standard (maximum 12)
  • Optional 4 source metals base plate
  • Variable speed substrate rotation
  • Film thickness control per pair of sources
  • Each source is fitted with its own shutter for complex recipe combinations
  • Easily removable liners on chambers facilitates material change
  • Optional step shutter for wedge or step film growth
  • Optional high temperature sources
  • Low profile sliding door for access to the sources through the glove box with gloved hands
  • Glove box facilitates charging of materials for cells under a controlled environment
  • Plug in style organic sources facilitates cleaning and exchange or replenishment
  • Co-deposition is achievable with two sources as each pair of metals sources are fitted with a source shutter
  • Quartz crystal monitors control rate and final film thickness
  • Optional step shutter for wedge or step film growth

The process chamber is constructed utilizing VG Scienta's rigid vacuum control procedures and five decades of UHV expertise to deliver a truly stable vacuum environment. It is possible to achieve Vacuum levels of < 10-8 mbar with bakeout facility if needed. An oil free turbomolecular pump set is used to pump the vessel to preserve the sample integrity. A master slave configuration provides the control for the unit, enabling the module to be run as an independent unit or as a component of the OFT Edge master control set.

About VG Scienta

VG Scienta is the merger of the former Vacuum Generators and Gammadata Scienta businesses. By combining the expertise and knowledge from both companies VG Scienta is uniquely suited to meet the current and future needs of our customers.

Established in 1964, VG Scienta’s vacuum component business (formerly Vacuum Generators) built a name for itself based on high quality and technical innovation in UHV applications. VG Scienta continues to pioneer and innovate to go beyond the high standards demanded by the vacuum market. This has led to opportunities in semiconductor, surface science and synchrotron applications, maintaining the company’s position at the forefront of ultra high vacuum (UHV) technology.

This information has been sourced, reviewed and adapted from materials provided by VG Scienta.

For more information on this source, please visit VG Scienta.

Date Added: May 8, 2013 | Updated: Jun 11, 2013
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