Automated Transfer of Substrates Between Process and Analysis Modules in UHV Thin Film Deposition

Table of Contents

Introduction – Central Distribution Module
Key Features and Benefits
Complex Material Development
About VG Scienta

Introduction – Central Distribution Module

The central distribution concept from VG Scienta provides more options in new material development, where the process could include steps such as in-situ analysis and multiple deposition stages for the qualification of material development without atmospheric exposure of the sample. Complexity is ever increasing in today’s materials and material research owing to the development of novel materials, barrier layers, coatings, and special protective layer materials, which are produced by multiple layers of deposition in accurately controlled environments. Devices are often fabricated by depositing over 20 films of unique recipes in order to deliver the optimum performance.

VG Scienta has created a range of ‘plug and play’ modules that can be operated either as a component of a central distribution handler, or as an independent workstation with a fast entry load lock. The central distribution handler is available in both fully automated and semi-automated setups. The fully automated configuration that is controlled by the central control system provides rapid, repeatable, ultra precise positioning of the sample inside the process chambers.

The standard units are available with six exit ports for handling samples of sizes of up to 100 mm. There is an option to increase the number of ports to 8 based on chamber size and orientation. For highly intensive research programs, there is an option to integrate multiple cluster tools in order to provide more number of options in material development.

Central Distrubution Handler Design

Key Features and Benefits

The following are the key features and benefits of the central distribution module:

  • Modular design for upgradeability
  • True UHV compatibility
  • Future proof
  • Samples never exposed to atmosphere
  • Handles mask and substrate
  • Easy transfer between modules
  • Rapid transfer time
  • Build to UHV quality standards
  • Sample size: 25-100 mm

Complex Material Development

Complex materials require complicated processes with integrated analysis and multiple deposition steps for optimum material development. The OFT EDGE tool from VG Scienta is suitable for complex material development. In today's world, the requirement for innovative materials is ever increasing and devices need to produced under highly controlled environment with focus on host/dopant ratio, life time, thinness, brightness, electron transfer, cost, flexibility, scalability, durability, and efficiency. Accurately controlling the environment wherein the materials are fabricated becomes crucial to obtain the optimum performance from these highly engineered devices.

Typical Structure

The OFT EDGE tool provides a flexible step by step approach to deposit encapsulation layers, TCOs, and organics on many different substrates from glass, silicon and plastics with sizes of up to 10 mm. Many different configuration options are available for this tool in order to fulfill the prerequisites of the user base platform. Moreover, the tool provides a good base for future upgrades. The following are the example configurations:

Two-pod setup

Six-pod setup

The following are the options available:

  • Integration to existing sample platforms
  • Six or eight satellites
  • Automation packages – Although the control systems can be operated as a stand-alone unit, they are typically slaved to the master control system. They are designed for facilitating process addition and upgrade.

About VG Scienta

VG Scienta is the merger of the former Vacuum Generators and Gammadata Scienta businesses. By combining the expertise and knowledge from both companies VG Scienta is uniquely suited to meet the current and future needs of our customers.

Established in 1964, VG Scienta’s vacuum component business (formerly Vacuum Generators) built a name for itself based on high quality and technical innovation in UHV applications. VG Scienta continues to pioneer and innovate to go beyond the high standards demanded by the vacuum market. This has led to opportunities in semiconductor, surface science and synchrotron applications, maintaining the company’s position at the forefront of ultra high vacuum (UHV) technology.

This information has been sourced, reviewed and adapted from materials provided by VG Scienta.

For more information on this source, please visit VG Scienta.

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