Integrated SEM and Optical Navigation Camera forr Rapid Feature Location

By AZoNano Staff Writers

Topics Covered

Introduction
Navigation Camera
Phenom User Interface
Correlative Microscopy
Advantages of Phenom Desktop SEM with an Integrated Navigation Camera
About Phenom-World

Introduction

Some samples that undergo SEM analysis are quite large, posing a difficulty in finding the point of interest or feature after the sample is loaded into the high magnification imaging electron microscope.

The sample is moved underneath the electron beam by the microscope stage, and an extensive search is often required to find the point of interest. This problem is addressed by the Phenom with a high-quality optical instrument, the Navigation Camera.

Navigation Camera

The Navigation Camera is completely integrated within the Phenom desktop SEM to enable finding a feature rapidly and accurately (Figure 1). The Navigation Camera in the Phenom yields useful data to make a connection between the optical and electron-optical images.

The ‘never lost’ sample function of the Navigation Camera enables users to navigate rapidly to any region of interest and to know where they are in the optical overview.

Figure 1. Components of the Phenom desktop SEM

The components of the Navigation Camera are depicted in Figure 2.

Figure 2. Key Components of the Navigation Camera

The specimen is positioned automatically under the Navigation Camera following the insertion of the sample holder into the Phenom. A high-speed integrated motorized stage is used to perform the sample transfer. Within five seconds after the insertion of the sample holder, the first optical image is acquired.

Phenom User Interface

The Phenom User Interface is shown in Figure 3. The main screen displays an optical image from a semiconductor device at 20x magnification. It is possible to manipulate the image by selecting one of the control buttons (zoom, illumination, focus) on the right.

The point of interest will be centered automatically by the motor stage when the main screen image is touched or clicked. Figure 4 illustrates the zoom functionality of the device.

Figure 3. The Phenom User Interface

Figure 4. Zoom functionality from 20x – 120x magnification

Two rings of LEDs inside and at bottom of the Navigation Camera provide the illumination, allowing for setting the optimum contrast and brightness for the sample. The selection of bright or dark field illumination is based on the sample (Figures 5 and 6).

Figure 5. Dark field illumination. Sample contrast comes from light scattered by the sample.

Figure 6. Bright field illumination. Sample contrast comes from absorbance of light from the sample.

Imaging in electron mode relies on grey video level. For specific samples where data between features is differentiated by color, finding these features can be very difficult if the optical Navigation Camera is not available.

Optical color information from a printed circuit board (PCB) at 50x magnification is shown in Figure 7, while Figure 8 shows the topographic data from the same PCB at 175x magnification.

Figure 7. Optical color information from a printed circuit board (PCB) at 50x magnification.

Figure 8. Topographic information from the same PCB at 175x magnification.

Correlative Microscopy

The integrated Navigation Camera enables matching high magnification optical colored images with low magnification electron images (Figure 9). The standard integrated Phenom motor stage facilitates rapid navigation towards any point of interest through a mouse click or by choosing the desired location on the touch screen monitor. The screenshot depicts a part of the Phenom User Interface. The main screen delineates a topographical image from a printed circuit board.

Figure 9. Correlative microscopy – optical color information with electron optical depth of focus.

It is possible to center a point of interest through selection in the main screen or in the optical overview which is always accessible during high magnification electron imaging. The small yellow square inside the optical overview represents the position and field of view in SEM mode (Figure 10).

Figure 10. Topographical image from a printed circuit board

Advantages of Phenom Desktop SEM with an Integrated Navigation Camera

Being the only desktop SEM with an integrated Navigation Camera, Phenom fills the gap between the optical and electron optical world. The following are the key features and benefits of the Navigation Camera:

  • Fully integrated in Phenom hardware and software
  • 10 MP color CMOS chip with large digital zoom range
  • 6 Lens system for distortion-free image
  • Telecentric optics
  • Bright field or dark field illumination for best imaging setting for any sample
  • Motor driven focus system enables convenience and speed
  • High quality zero-play mechanical movement provides precision focus
  • High quality optical imaging
  • Color information
  • ‘Never lost’ sample navigation
  • Optical focal point setting is used for fast autofocus in SEM mode
  • Optical overview – rapid navigation and feature finding with integrated motor stage

About Phenom-World

Phenom™, world’s fastest Desktop Scanning Electron Microscope takes your imaging performance to a higher level. The Phenom desktop scanning electron microscope (SEM) helps customers stay competitive in a world where critical dimensions are continuously getting smaller.

The Phenom desktop SEM combines superb imaging power up to 100,000x and outstanding technical performance with better depth of focus and chemical contrast. It is the smart, affordable and market’s fastest solution that enables engineers, technicians, researchers and educational professionals to investigate micron and submicron structures.

With the Phenom proX we offer integrated, powerful EDS microanalysis to complete the optical performance of our SEM-range. Any Phenom system can be tailored to suit application and sample needs by choosing one of the many Pro Suite-based software solutions or specially designed hardware accessories.

Phenom-World helps you to stay competitive in a world where critical dimensions are continuously getting smaller. The Phenom desktop SEM offers direct access to the high-resolution and high-quality imaging necessary in a large variety of applications. It is an affordable solution that enables engineers, technicians, researchers and educational professionals to visualize micron and submicron structures.

This information has been sourced, reviewed and adapted from materials provided by Phenom-World BV.

For more information on this source, please visit Phenom-World BV.

Date Added: Feb 21, 2014 | Updated: Mar 7, 2014
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