Uniform Thermal Vapor Deposition of Metals in UHV Thin Film Processes

Table of Contents

Introduction to VG Scienta Metallization Module
Key Features and Benefits
About VG Scienta

Introduction to VG Scienta Metallization Module

The metallization module from VG Scienta is a versatile system for the thermal evaporation of metals across a broad range of temperatures. The tool can be operated either as a component of the VG Scienta OFT EDGE cluster tool, or as an independent workstation when integrated with the VG Scienta range of fast entry load locks. The standard unit is offered with four thermal sources with shutters to enable co-evaporation of materials.

The systems are available in many different formats from manual to completely automated units. However, control system concept remains the same, thus facilitating the unit to serve as a deposition system that can be controlled by a master slave configuration. The combination of both source and substrate shutters and computer-connected film thickness monitor units manages and controls the operation of the metallization module.

The chamber is designed and built utilizing VG Scienta’s UHV techniques and is completely bakeable with a base pressure in the region of 10-9 mbar at ambient. This provides a low background, contamination-free, and ultra clean deposition zone.

Key Features and Benefits

The following are the key features and benefits of the VG Scienta metallization module:

  • Simple yet powerful thermal cell design
  • Variable source to substrate distance
  • Substrate rotation ensures optimum deposition uniformity
  • Co-evaporation possible
  • Substrate uniformity of ±5%
  • Easy-to-clean removable shields prevents cross source contamination and allows easy material change
  • Effective cross talk baffles
  • Cold wall technology ensures purity
  • UHV Clean base unit
  • Sample transfer can handle 100 mm square or round samples and mask assemblies
  • Flexible design allows the inclusion of additional sources, including Knudsen cell or organic cell deposition

The availability of variable length evaporation distances (+/-50 mm around an optimum transfer position) provides optimum flexibility for individual recipes. The unit is pumped by utilizing dry turbomolecular pump sets. The source area of the vessel is water cooled in order to maintain low pressures during deposition.

About VG Scienta

VG Scienta is the merger of the former Vacuum Generators and Gammadata Scienta businesses. By combining the expertise and knowledge from both companies VG Scienta is uniquely suited to meet the current and future needs of our customers.

Established in 1964, VG Scienta’s vacuum component business (formerly Vacuum Generators) built a name for itself based on high quality and technical innovation in UHV applications. VG Scienta continues to pioneer and innovate to go beyond the high standards demanded by the vacuum market. This has led to opportunities in semiconductor, surface science and synchrotron applications, maintaining the company’s position at the forefront of ultra high vacuum (UHV) technology.

This information has been sourced, reviewed and adapted from materials provided by VG Scienta.

For more information on this source, please visit VG Scienta.

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