Fundamental Principles of Engineering Nanometrology
Fundamental Principles of Engineering Nanometrology provides a comprehensive
overview of engineering metrology and how it relates to micro and nanotechnology
(MNT) research and manufacturing. By combining established knowledge with the
latest advances from the field, it presents a comprehensive single volume that
can be used for professional reference and academic study.
Key Features
- Provides a basic introduction to measurement and instruments
- Thoroughly presents numerous measurement techniques, from static length
and displacement to surface topography, mass and force
- Covers multiple optical surface measuring instruments and related topics
(interferometry, triangulation, confocal , variable focus, and scattering
instruments)
- Explains, in depth, the calibration of surface topography measuring instruments
(traceability; calibration of profile and areal surface texture measuring
instruments; uncertainties)
- Discusses the material in a way that is comprehensible to even those with
only a limited mathematical knowledge
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