The ECV
Pro is the result of a total redesign that completely redefines ECV profiling.
We have taken 25 years of profiling experience and coupled it with 25 years
of advances in instrument control technology to produce the most precise, most
reproducible, most highly-automated CV profiler ever. The ECV
Pro was designed, from the ground up, to eliminate all operator dependent
variations in the data. All the operator has to do is set the wafer on the stage.
After initial setup, the ECV
Pro takes care of everything else.
ECV
Pro introduces the first ever in-situ camera for unprecedented levels of
control. We call it ECVision™ and it allows real-time imaging of the semiconductor/
electrolyte interface. Now you can see exactly what occurs at the sample surface
during a measurement.
For III-Nitrides, the ECV
Pro GaN option extends the performance of the system for optimal profiling
of GaN, InGaN and AlGaN.
- Elimination of data variation due to operator
- Dramatic improvement in reproducibility
- Integrated design leads to small footprint
- ECVision aids measurement diagnostics
