NPXY1025-187 Closed-Loop XYZ Nanopositioner from nPoint

The NPXY10Z5-187 is a closed-loop XYZ nanopositioner with 10x10x5µm range of motion. It is fabricated from invar. It is ideal for AFM applications due to its high resonant frequency. Similar to most nPoint scanners it uses capacitive sensors for closed-loop feedback. It is UHV compatible.

Applications

The applications of the NPX0Z5-187 are:

  • Near-field scanning optical microscopy
  • Scanning probe microscopy
  • Lithography
  • Nanometer-scale manipulation
  • Metrology
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