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Automated Cluster System for Thin Film Deposition Processes – Nebula

Automated Cluster System for Thin Film Deposition Processes – Nebula

Nebula from Angstrom Engineering​ has been designed with high quality automation and engineering precision. These integrated vacuum systems are engineered specifically to meet customer’s research and process requirements, and are connected by a central robot that can handle many samples across each module, while maintaining vacuum.

The type and number of modules can be chosen by users, and provide room for possible expansion in the future. Each module can be built to meet the user’s technological and application needs, using proven sub-assemblies and components. Angstrom Engineering’s goal is to offer a robust, engineered system supported by their world renowned customer support.

Substrate size: substrates measuring 200 mm x 200 mm can be easily accommodated and the modules can be built for use with larger substrates if required.

AERES integrated software: Users can create and control recipes across all process parameters, including:

  • Automation - press start and the system takes care of everything
  • Pre-deposition - wafer preparation, source ramp-up, and stabilization
  • Stage control - heating, cooling, rotation, angle, and biasing
  • Layer control - thickness, rate, shuttering, and source idling
  • Gas and pressure - pressure stability, and precise gas delivery

Throughput: This will depend on process complexity and duration. However, the AERES integrated software platform optimizes layer to layer transitions to greatly minimize overall process time.

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Module Options

  • Support for multiple physical vapor deposition (PVD) processes as well as atomic layer deposition (ALD), and chemical vapor deposition (CVD) integration
  • Several vacuum deposition modules are available for CVD, PVD, and ALD
  • Substrate cleaning and preparation using ion beam or plasma sources can be added into any process module
  • Substrate and mask storage cassette chambers can hold 25 or more sample trays as required
  • Glovebox environments can be added to one or more modules
  • Distribution modules using SCARA robots are sized to match user’s needs

Standard Key Features

  • The AERES integrated control software comes as standard and is capable of creating and controlling recipes across the whole process, from pre-deposition, through layer control (including exceptional low-rate stability), gas and pressure control, stage control, and automation
  • Custom manufactured to suit specific process requirements
  • Multi-user on-site training offered with every system
  • Comprehensive training manual explains operation and maintenance of the equipment for new users
  • User safety is top priority with features such as cutting power to sources if the chamber is open
  • Eight-hour response guarantee

Optional Features

  • Stainless steel or aluminum chamber options
  • High-vacuum or ultra-high-vacuum configurations
  • Glove box integration
  • Heated, cooled and biased stages
  • International input voltages can be provided
  • Planetary and dome fixturing
  • Roll to roll processing
  • Variable angle stages for creation of complex nano-structures and coatings for imagery
  • Load locks and semi to fully automated substrate and mask handling
  • Additional customization is available

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