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NT-MDT NTEGRA Prima Scanning Probe Microscope

NTEGRA Prima is a multifunctional device for performing the most typical tasks in the field of Scanning Probe Microscopy.

The device is capable of performing more than 40 measuring methods, what allows analyzing physical and chemical properties of the surface with high precision and resolution. It is possible to carry out experiments in air, as well as in liquids and in controlled environment. The new generation electronics provides operations in high-frequency (up to 5MHz) modes. This feature appears to be principal for the work with high-frequency AFM modes and using high-frequency cantilevers.*

There are several scanning types implemented in NTEGRA Prima: scanning by the sample, scanning by the probe and dual-scanning. On account of that, the system is ideal for investigating small samples with ultra-high resolution (atomic-molecular level) as well as for big samples and scanning range up to 100x100x10 µm. The unique DualScan TM mode allows investigating even bigger fields on the surface (200x200 µm for X, Y and 22 µm for Z) that can be useful, for example, for living cells and MEMS components.

Built-in three axes closed loop control sensors trace the real displacement of the scanner and compensate unavoidable imperfections of piezoceramics as non-linearity, creep and hysteresis. The sensors, which are used by NT-MDT, have the lowest noise level, thus allowing working with closed loop control on the very small fields (down to 10x10 nm). This is especially valuable for carrying out nanomanipulation and lithography modes.

NTEGRA Prima has a built-in optical system with 1 µm resolution, which allows imaging the scanning process in real-time.

Key features:

  • closed loop control with the lowest noise level (can be used for scanning fields of <100 nm)
  • optical microscope with the resolution of 1µm
  • scanning by sample (the lowest noise level, the best resolution on the small fields), scanning by probe (maximum scanning range, working with large samples)
  • more than 40 measuring modes, including unique ones
  • carrying out experiments in air, in liquids, in controlled environment
  • possibility of expanding functionality

* E.g. the unique method of Atomic-Force Acoustic Microscopy (AFAM) allows investigating soft and hard samples with carrying out quantitative measurements of Young modulus in every scanning point. AFAM allows obtaining much better contrast as compared to Phase Imaging Mode for the soft objects, and makes possible the obtainment of contrast on the hard samples, what is a very hard task when one uses other methods.

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