ECV Pro Electrochemical Capacitance Voltage Profiler from Nanometrics

The ECV Pro is the result of a total redesign that completely redefines ECV profiling. We have taken 25 years of profiling experience and coupled it with 25 years of advances in instrument control technology to produce the most precise, most reproducible, most highly-automated CV profiler ever. The ECV Pro was designed, from the ground up, to eliminate all operator dependent variations in the data. All the operator has to do is set the wafer on the stage. After initial setup, the ECV Pro takes care of everything else.

ECV Pro introduces the first ever in-situ camera for unprecedented levels of control. We call it ECVision™ and it allows real-time imaging of the semiconductor/ electrolyte interface. Now you can see exactly what occurs at the sample surface during a measurement.

For III-Nitrides, the ECV Pro GaN option extends the performance of the system for optimal profiling of GaN, InGaN and AlGaN.

  • Elimination of data variation due to operator
  • Dramatic improvement in reproducibility
  • Integrated design leads to small footprint
  • ECVision aids measurement diagnostics
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