XE-HDM
is an automatic defect review AFM which revolutionizes the way defects in HDD
substrates and media are searched, scanned, and analyzed. The new XE-HDM
significantly increases throughput for the defect review process; test runs
with real defects demonstrate over 500 - 800% gain in throughput when compared
with other methods of defect review.
Artifact Free Metrology by Crosstalk Elimination
- Two independent, closed-loop XY and Z flexure scanners for sample
and tip
- Flat and linear XY scan of 100 µm x 100 µm with low
residual bow
- Out of plane motion of less than 2 nm over entire scan range
- Accurate feature measurements with industry leading gauge sigma
- Superior tool to tool matching
Longer Tip Life by True Non-Contact Mode
- 10 times larger Z-scan bandwidth than a piezotube
- 10 times or longer tip life for general purpose & defect imaging
- Less tip wear for prolonged high-quality and high-resolution imaging
- Minimized sample damage or modification
- Immunity from parameter-dependent results observed in tapping imaging
Automatic Defect Review for Media and Substrates
- Full automation results in 500~800% gain in throughput
- Allows users to manage several tools simultaneously
- Transfer KLA Tencor Candela defect maps to XE-HDM
- Automated survey scan of defects mapped by Candela
- Automated zoom-in scan of specified defects
- Automated profiling of imaged defect types
- Automated analysis of imaged defects