Site Sponsors
  • Technical Sales Solutions - 5% off any SEM, TEM, FIB or Dual Beam
  • Park Systems - Manufacturer of a complete range of AFM solutions
  • Oxford Instruments Nanoanalysis - X-Max Large Area Analytical EDS SDD
  • Strem Chemicals - Nanomaterials for R&D

Park Systems XE-3DM Atomic Force Microscope

Park Systems has revolutionized the AFM with the introduction of the XE-3DM, the fully automated AFM system designed for overhang and trench profiles, sidewall roughness and imaging, and critical angle measurements. The unique design of the XE-3DM, made possible by the XE-series' decoupled XY and Z scanning system, allows for characterization of undercut features as well as top surfaces. In using Park Systems' True Non-Contact mode, the XE-3DM can realize non-destructive imaging of soft photoresist structures at the same scanning speed as any other XE-series platform.

High Resolution Access to Undercut and Sidewall

  • Two independent, closed-loop XY and Z flexure scanners for sample and tip
  • Z-scanner is tilted sideways from -40 to +40 degrees
  • Use of normal high aspect ratio tips for high resolution imaging
  • XY scan of up to 100 µm x 100 µm
  • Up to 25 um Z scan range by high force scanner

Non-destructive CD and Sidewall Measurements by True Non-Contact Mode

  • 10 times larger Z-scan bandwidth than a piezotube
  • Less tip wear for prolonged high-quality and high-resolution imaging
  • Minimized sample damage or modification
  • Soft photoresist structures can be imaged non-destructively
  • Immunity from parameter-dependent results observed in tapping imaging

Complete 3D Metrology of Sidewall

  • Sidewall roughness measurement
  • Critical angle measurement of sidewalls
  • Critical dimension measurements of vertical sidewalls

High Throughput Inline Automation

  • Allowable sample size: 200/300mm wafers
  • Automatic data acquisition and analysis of trench, overhang, and undercut Features
  • Automatic tip exchange (optional)
  • Equipment Front End Module (EFEM) for wafer Handling (optional)
  • Cleanroom compatibility and remote control interface
Ask A Question

Do you have a question you'd like to ask the manufacturer of this equipment or can you provide feedback regarding your use of this equipment?

Leave your feedback
Submit
Other Equipment by this Supplier
Other Equipment