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Vakuum nanopositioning Stadier - P-915 fra PI

P-915KLVS høj dynamik, vakuum-kompatibel, høj belastning nanopositioner XYZ piezo-scanneren giver en meget stor klar blænde på 200 x 200 mm.

Funktioner og Fordele

  • Vakuum Kompatibel til 10-6 hPa
  • Direkte Metrologi med Kapacitive sensorer
  • Fremragende Rethed: <0,1 μrad kast
  • Friktionsløs, High-Precision flexure Guiding System
  • Direkte Metrologi med Kapacitive sensorer

Last Update: 10. October 2011 13:47

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