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Vacuum Nanopositioniertische - P-915 von PI

P-915KLVS hoher Dynamik bietet Vakuum-kompatibel, high-load Nanopositionierer XYZ Piezo-Scanner eine sehr große Apertur von 200 x 200 mm.

Features & Vorteile

  • Vacuum Kompatibel bis 10-6 hPa
  • Direktmetrologie mit kapazitiven Sensoren
  • Hervorragende Geradheit: <0,1 mrad Rundlauf
  • Frictionless, High-Precision-Führungssystem
  • Direktmetrologie mit kapazitiven Sensoren

Last Update: 10. October 2011 13:50

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