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Posted in | X-Ray Diffractometers

X'Pert PRO MRD XL XRD System from PANalytical

The X'Pert PRO MRD XL is an enlarged and improved version of PANalytical’s proven X'Pert PRO MRD XRD system. By facilitating X-ray analysis during the process development stage, the X'Pert PRO MRD XL represents the logical 'next step' in advanced materials analysis. It achieves this with two unique product advantages:

  • complete mapping of wafers up to 200 mm and significantly enhanced mapping of wafers up to 300 mm
  • a sophisticated, automatic wafer loader option that enables the X'Pert PRO MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder

The X'Pert PRO MRD XL meets the need for all application techniques including: thin film studies, wafer mapping and stress and texture analysis. This makes the X'Pert PRO MRD XL extremely effective in application areas such as: compound and silicon based semiconductors, nanomaterials, and oversized and heavy samples.

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