The X'Pert PRO MRD XL is an enlarged and improved version of PANalytical’s proven X'Pert PRO MRD XRD system. By facilitating X-ray analysis during the process development stage, the X'Pert PRO MRD XL represents the logical 'next step' in advanced materials analysis. It achieves this with two unique product advantages:
- complete mapping of wafers up to 200 mm and significantly enhanced mapping of wafers up to 300 mm
- a sophisticated, automatic wafer loader option that enables the X'Pert PRO MRD XL to function as an 'in-wall' system, with the wafer being loaded from a clean room environment and placed on to a self-centered wafer holder
The X'Pert PRO MRD XL meets the need for all application techniques including: thin film studies, wafer mapping and stress and texture analysis. This makes the X'Pert PRO MRD XL extremely effective in application areas such as: compound and silicon based semiconductors, nanomaterials, and oversized and heavy samples.