The OmniGIS™ is Omniprobe's new multiple gas injection system for the FIB or SEM. It provides programmable feedback control of three on-board gas sources and an additional external purge/carrier gas source while occupying only a single GIS port! The user can create and recall complex process flows. The OmniGIS™ is compatible with both deposition precursors, Tungsten, Platinum, Oxides, as well as etch chemistries. The OmniGIS™ uses industry standard solid or liquid precursor crucibles that are user replaceable with no realignment of the injector system required.
Key Features:
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Industry Leading Gas Injector Single Needle - Single Port - Multi-Source
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Wide Variety of Sources Including Solid, Liquid and Gas
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Motor Driven Needle Positioning
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Intuitive Graphical Software “Drag & Drop” Recipe Builds
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Individual or Mixed Source Delivery
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Local or Remote Control from SEM, FIB, and Lithography Systems
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Advanced Software Features for Research
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Multi-Function Controller Stand-Alone Ethernet Link to SEM/FIB Computer
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Precision Flow Control
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Additional Control of Existing Gas Injectors