KLA’s P-7 stylus profiler surface measurement system provides excellent measurement repeatability for consistent measurement performance. It has 150mm scan length standard that can provide long scan capability without the need for stitching.
The Tencor™ P-7 includes the UltraLite® sensor, which delivers dynamic force control, exceptional linearity, and high vertical resolution, thereby making it an ideal sensor for a surface measurement system.
The P-7 stylus profiler is one of the easiest devices to use on the market, and its features are designed to suit R&D, university, and production environments.
Key Features
The main features of the P-7 stylus profiler include:
- Vertical range up to 1mm
- Ultra-flat scanning stage
- Superior measurement repeatability and reproducibility
- Fully-motorized XY stage, Z stage, and 360° theta stage
- Surface measurement system with point-and-click operation and productivity package (sequencing, pattern recognition, SECS/GEM)
- Reliable
- Easily adaptable
Applications
The main applications of the P-7 stylus profiler include:
- Thin and thick film step height measurements
- Surface roughness and waviness characterization
- Photoresist / soft films
- Etched trench depth
- Defect review and defect analysis
- Surface curvature and form
- 2D stress of thin films
- 3D imaging of various surfaces
- Dimensional analysis and surface texture
Broad Range of Industries
The P-7 capabilities support research, production, and quality control (QC) across a wide range of industries, including:
- Universities, research labs, and institutes
- Medical devices
- Semiconductor and compound semiconductor
- SIMS craters
- LED (light-emitting diodes) and power devices
- Solar
- Automotive
- MEMS (micro-electro-mechanical systems)
- Data storage