The Beneq TFS
1200 is an ALD processing module that is integrated into CIGS evaporation
or rapid thermal processing (RTP) selenization lines. Deposition time for a
30 nm thick Zn(O,S) buffer layer is less than 5 min. ALD is more compact and
less expensive than conventional CBD-CdS buffer layer processes.
The Beneq TFS
1200 is an application-specific system designed for industrial in-line production
of buffer layer coatings on copper-indium-gallium-diselenide (CIGS) thin film
solar cells. The maximum substrate size is 1200 × 1200 (mm), a recognized
world-record in substrate size in ALD.