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TFS 1200 Thin Film Deposition System fra Beneq

Den Beneq TFS 1200 er et ALD behandlingen modul, der er integreret i CIGS fordampning eller hurtig termisk behandling (RTP) selenization linjer. Deposition gang for en 30 nm tyk Zn (O, S) buffer lag er mindre end 5 min. ALD er mere kompakt og billigere end konventionelle CBD-CdS buffer lag processer.

Den Beneq TFS 1200 er et program-specifikke system designet til industrielle in-line produktion af buffer lag belægninger på kobber-indium-gallium-diselenide (CIGS) tyndfilm solceller. Den maksimale substrat størrelse er 1200 × 1200 (mm), en anerkendt verdens-rekord i substrat størrelse i ALD.

Last Update: 9. October 2011 23:04

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