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TFS NX300 Thin Film Deposition System from Beneq

The TFS NX300 Thin Film System is a fully automatic coating system designed for industrial-scale manufacturing of surface passivation coatings on crystalline silicon solar cell wafers.

TFS NX300 exhibits the following main properties:

  • Industrial fully-automated production equipment
  • Automatic cassette-to-cassette system
  • Throughput 3200 wafers/h
  • Detailed setup subject to customer specifications
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