Posted in | Thin-Film Deposition Systems | Atomic Layer Deposition (ALD) Systems

Het Systeem van het Deposito van de Dunne Film TFS NX300 van Beneq

Het Systeem van de Dunne Film TFS NX300 is een volledig automatisch deklaagsysteem dat voor productie op industriële schaal van de deklagen van de oppervlaktepassivering op de kristallijne wafeltjes van de siliciumzonnecel wordt ontworpen.

TFS NX300 stelt de volgende belangrijkste eigenschappen tentoon:

Industriële volledig-geautomatiseerde productieapparatuur
Automatisch cassette-aan-cassette systeem
Productie 3200 wafers/h
Gedetailleerde opstelling onderworpen aan klantenspecificaties

Last Update: 11. January 2012 04:37

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