Site Sponsors
  • Oxford Instruments Nanoanalysis - X-Max Large Area Analytical EDS SDD
  • Park Systems - Manufacturer of a complete range of AFM solutions
  • Strem Chemicals - Nanomaterials for R&D

Automated UV-NIL Nanoimprint Lithography System - The IQ Aligner from EV Group

The IQ Aligner Ultraviolet Nanoimprint Lithography (UV-NIL) System allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300mm diameter. Uniform contact force for high yield large area printing is provided by EV Group's proprietary chuck design which supports both soft and hard stamps. Configurations include release mechanisms for stamps from imprinted substrates.

Features of the IQ Aligner UV-NIL System

  • For micromolding applications of optical elements
  • For full field nanoimprinting applications
  • 3 independently controlled z-spindles for superior wedge compensation between stamp and substrate
  • 3 independently controlled z-spindles for TTV control of imprint resist
  • Soft UV-NIL processes utilizing soft working stamps
  • EVG's proprietary fully automated de-embossing function
  • Resist dispense station integration
  • Bond alignment and UV-bonding capabilities
Ask A Question

Do you have a question you'd like to ask the manufacturer of this equipment or can you provide feedback regarding your use of this equipment?

Leave your feedback
Submit
Other Equipment by this Supplier
Other Equipment