Plasma Etching-Cleaning System - TETRA-30-LF-PC from Diener Electronic

The small scale system TETRA-30-LF-PC with 30 litres chamber volume is used for production in the domains: cleaning, etching and activation.

Technical Data

  • Switchgear cabinet: W 600 mm, H 800 mm, D 650 mm
  • Chamber: W 305 mm, H 300 mm, L 370 mm (optional: L 625 mm)
  • Chamber volume: approx. 34 litres
  • Gas supply: 3 gas channels through MFC
  • Generator: 40kHz/0-1000 W (optional 13.56 MHz or 2.45 GHz)
  • Vacuum pump: Leybold, Type D16B (25 m³/h)
  • Trays: up to 6 trays (optional: rotary drum)
  • Control: PC control (Windows)

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