The small scale system TETRA-30-LF-PC with 30 litres chamber volume is used for production in the domains: cleaning, etching and activation.
Technical Data
- Switchgear cabinet:
W 600 mm, H 800 mm, D 650 mm
- Chamber:
W 305 mm, H 300 mm, L 370 mm
(optional: L 625 mm)
- Chamber volume:
approx. 34 litres
- Gas supply:
3 gas channels through MFC
- Generator:
40kHz/0-1000 W
(optional 13.56 MHz or 2.45 GHz)
- Vacuum pump:
Leybold, Type D16B (25 m³/h)
- Trays:
up to 6 trays
(optional: rotary drum)
- Control:
PC control (Windows)