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Plasma Etching-Membersihkan Sistem - TETRA-30-LF-PC dari Diener Elektronik

Sistem skala kecil TETRA-30-LF-PC dengan 30 volume ruang liter digunakan untuk produksi dalam domain: membersihkan, etsa dan aktivasi.

Data Teknis

  • Switchgear kabinet: W 600 mm, 800 mm H, D 650 mm
  • Kamar: W 305 mm, 300 mm H, L 370 mm (opsional: L 625 mm)
  • Volume ruang: approx. 34 liter
  • Pasokan gas: gas 3 saluran melalui MFC
  • Generator: 40kHz/0-1000 W (opsional 13,56 MHz atau 2,45 GHz)
  • Pompa vakum: Leybold, Jenis D16B (25 m³ / h)
  • Trays: sampai 6 nampan (opsional: Drum rotary)
  • Pengendalian: PC kontrol (Windows)

Last Update: 23. October 2011 03:10

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