Posted in | Plasma Etching Systems

Plasma-etsen-Cleaning System - TETRA-30-LF-PC van Diener Electronic

De kleinschaligheid systeem TETRA-30-LF-pc met 30 liter kamer volume is gebruikt voor de productie in de domeinen: schoonmaak, etsen en activering.

Technische gegevens

Schakelkast: W 600 mm, H 800 mm, D 650 mm
Kamer: W 305 mm, H 300 mm, L 370 mm (optioneel: L 625 mm)
Kamer volume: ca.. 34 liter
Gastoevoer: 3 gas kanalen MFC
Generator: 40kHz/0-1000 W (optioneel 13,56 MHz of 2,45 GHz)
Vacuümpomp: Leybold, Type D16B (25 m³ / h)
Laden: tot 6 laden (optioneel: roterende trommel)
Controle: PC control (Windows)

Last Update: 15. October 2011 16:46

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