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等离子蚀刻清洁系统 - 从电子的 Diener 的 TETRA-30-LF-PC

与 30 公升的小规模系统 TETRA-30-LF-PC 燃烧室容积为生产使用在域: 清洁、蚀刻和启动。

技术数据

  • 互换机机柜: W 600 mm, H 800 mm, D 650 mm
  • 房间: W 305 mm, H 300 mm, L 370 mm (选项: L 625 mm)
  • 燃烧室容积: 大约 34 公升
  • 供气: 3 条气体通道通过 MFC
  • 生成器: 40kHz/0-1000 W (选项 13.56 MHz 或 2.45 GHz)
  • 真空泵: Leybold,类型 D16B (25 m ³ /h)
  • 盘: 6 个盘 (选项: 转台式鼓)
  • 控制: 个人计算机控制 (Windows)

Last Update: 11. January 2012 04:36

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