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Plasma Etcher-Asher-Cleaner - The K1050X from Quorum Technologies

The K1050X Plasma Etcher/Asher/Cleaner is a modern, solid-state RF plasma barrel reactor designed to meet the requirements of research and development and small-scale production for a wide and varied range of plasma etching, plasma ashing and plasma cleaning applications.

Key Features

Key features of the Quorum Technologies K1050X Plasma Etcher/Asher/Cleaner include:

  • Drawer type specimen stage - gives easy convenient specimen access
  • Micro-controller: fully programmable by the operator - easy, flexible operation
  • Fully-automatic operation
  • Modern solid state RF power supply - rugged and reliable
  • Automatic tuning of forward and reflected power - ensures optimum power conditions for plasma ashing and plasma etching protocols
  • LCD display - operator sees all conditions (vacuum, RF power, elapsed time) during operation
  • Two gas flow meters - allows precise control and mixing of process gases, especially useful for plasma etching processes
  • Pump-down to predetermined vacuum before admitting gases
  • Vent control - minimal specimen disturbance, especially useful for fine plasma-ashed specimens
  • Three-year warranty
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