The K1050X Plasma Etcher/Asher/Cleaner is a modern, solid-state RF plasma barrel reactor designed to meet the requirements of research and development and small-scale production for a wide and varied range of plasma etching, plasma ashing and plasma cleaning applications.
Key Features
Key features of the Quorum Technologies K1050X Plasma Etcher/Asher/Cleaner include:
- Drawer type specimen stage - gives easy convenient specimen access
- Micro-controller: fully programmable by the operator - easy, flexible operation
- Fully-automatic operation
- Modern solid state RF power supply - rugged and reliable
- Automatic tuning of forward and reflected power - ensures optimum power conditions for plasma ashing and plasma etching protocols
- LCD display - operator sees all conditions (vacuum, RF power, elapsed time) during operation
- Two gas flow meters - allows precise control and mixing of process gases, especially useful for plasma etching processes
- Pump-down to predetermined vacuum before admitting gases
- Vent control - minimal specimen disturbance, especially useful for fine plasma-ashed specimens
- Three-year warranty